发明名称 Projection Objective
摘要 Projection exposure device and also projection objective with a lens arrangement which has at least one lens group of negative refractive power, this lens group comprising at least four lenses of negative refractive power, and a lens of positive refractive power being arranged after the third lens of negative refractive power in this lens group.
申请公布号 US2003048547(A1) 申请公布日期 2003.03.13
申请号 US20020094565 申请日期 2002.03.08
申请人 SCHUSTER KARL-HEINZ 发明人 SCHUSTER KARL-HEINZ
分类号 G02B13/24;G02B13/14;G02B13/18;G02B13/22;G03F7/20;H01L21/027;(IPC1-7):G02B9/34;G02B15/14 主分类号 G02B13/24
代理机构 代理人
主权项
地址