| 摘要 |
PROBLEM TO BE SOLVED: To provide a foil gas bearing controlling frictional force by keeping in contact with a rotary shaft and bearing material when an instrument stops and goes, and capable of precisely maintaining a bearing clearance between the rotary shaft and bearing material by simply and accurately installing a back-spring to the bearing material, and capable of adjusting the bearing clearance during an assembling state and an operating state of the bearing, and capable of adjusting a high temperature member without any trouble by improving a heat-resistant property by making maximum temperature in use of the bearing material increased. SOLUTION: In the foil gas bearing supporting the back-spring made of a thin sheet on an inner surface side of a bearing housing and supporting the thin sheet-shaped bearing material supporting the rotary shaft on an inner side of the back-spring, the foil gas bearing comprises an electromagnet actuator capable of moving to a radial direction guided by a guide member arranged in the bearing housing in a radial direction and having an adjusting piece supporting an outer peripheral supporting portion of the back-spring and an electromagnet making the adjusting piece moved by supply and stoppage of the magnetic force, and a magnet controlling unit controlling supply and stoppage of magnetic force of the electromagnet actuator. |
