| 摘要 |
PROBLEM TO BE SOLVED: To improve measuring accuracy by reducing a temperature drift. SOLUTION: This probe scanner is provided with: a thick pipe part 15 having one end supported by a housing 1, extended in the z-direction and having the other end capable of being rocked; an intermediate cylinder 13 passing the inside of the pipe part 15; a viscous body 17 filled between the pipe part 15 and the intermediate cylinder 13; a heating coil 16 for heating the viscous body 17; zoom mechanisms 71, 72, 73 and 74 for selectively fixing the pipe part 15 to the housing 1; a voice coil motor for roughly and finely moving the intermediate cylinder 13 along the pipe part 15; and a probe 10 mounted to a tip of the intermediate cylinder 13. In the probe scanner, the heating coil 16 is energized to lower the viscosity of the viscous body 17 during the rough movement for bringing the probe in the vicinity of the sample surface, and fixing means 83, 84, 85 and 86 for selectively fixing the pipe part 15 and the intermediate cylinder 13 are installed. |
