| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measuring device of a material and its method using the focal length of an optical fiber lens, for measuring the material thickness by utilizing the fact that the intensity of light reflected from the focal length is largest when light emitted from the optical fiber lens is focused on the material. SOLUTION: This device has a constitution wherein, when a so-called Gaussian beam having an intensity distribution showing a Gauss distribution is emitted and the optical fiber lens is moved vertically, adhesively to PZT, so that the Gaussian beam is focused on the surface of the material coated on a substrate, the quantity of light reflected by the substrate through the end of the optical fiber lens is detected, and the material thickness is measured by analyzing it.
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