FLUIDIC ELEMENT, METHOD OF MANUFACTURING THE SAME, FLUIDIC FLOWMETER AND COMPOSITE FLOWMETER

摘要

PROBLEM TO BE SOLVED: To provide a fluidic element in which a fluidic vibration in a small flow-rate region is stabilized and in which a flow-rate measuring region by a fluidic vibration output is expanded to the side of the small flow-rate region, by a method wherein the part of a wall along a fluid discharge port from a flow-channel expansion part is formed in an optimum shape. SOLUTION: In the method of manufacturing the fluidic element, the fluidic element 1 to be manufactured comprises a flow channel 5 which is formed by connecting a nozzle 3 to the flow-channel expansion part 4 wider than the cross section of the nozzle 3, an exciter 7 which is arranged in the part 4 in a position facing the exit of the nozzle 3, and an end block 8 which is arranged in the part 4 in a position as the downstream side of the exciter 7. A part in which a sidewall connected to the fluid discharge port from the part 4 is crossed with the bottom face is molded uniformly so as to become a curved surface at a definite curvature or less or a definite inclination or less.