| 摘要 |
PROBLEM TO BE SOLVED: To detect an uneven defect on an inspected specimen having a surface (smooth surface) having high reflectance and low diffusibility such as an ink-jet paper sheet, or an inspected specimen having a surface (rough surface) having low reflectance and high diffusibility such as a photosensitive material. SOLUTION: In this surface inspecting method for detecting the surface defect on the inspecting surface by irradiating the inspecting surface of the specimen with light from a light source, and by converging reflected light to analyze a difference between light energy from the normal inspecting surface and light energy from the defective inspecting surface, a depth angle is set at±2 deg. when surface glossiness of the specimen is 70% or more, or less than 10%, using as a parameter the depth angle that is a broadening angle with respect to an optical axis of the light converged from the inspecting surface.
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