| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming an electrode on a substrate having an inexpensive, efficient, and very small three-dimensional structure by which an electrode maintained in a desirable electrically connected state over a desired extent can be formed in a desired pattern even when the electrode has a three- dimensional shape by utilizing the conventional device, and to provide a microchip manufactured by the method. SOLUTION: At the time of forming the electrode on the substrate having the very small three-dimensional structure composed of a very small recessed and projecting section, groove section, etc., by this method, an electrode forming material layer maintained in a conductive state is formed from one internal wall surface of the structure to the bottom sections of the structure positioned on both sides of the structure and the surface of a substrate. The microchip is manufactured by this method.
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