PLASMA TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus capable of preventing the contamination with a metal from a plasma treatment chamber allowed to act as an earth electrode and capable of easily controlling the temperature of a surface exposed to plasma. SOLUTION: In the plasma treatment apparatus for independently performing the formation of plasma and the control of the incident energy of ions to a sample, the surface comprising an earthed conductive metal and coming into contact with plasma in the plasma treatment chamber is coated with a plasma- resistant polymeric material 22 becoming t/kε<300 in the relation between a specific dielectric constant kε and thickness t (μm).