发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce defective products due to a cobwebbing phenomenon of an adhesive or the like in a pellet bonding process. SOLUTION: In an applying process of a paste such as an adhesive 40 prior to the pellet bonding process, after the adhesive 40 is applied from a paste nozzle 13 onto a tab 21 of a lead frame 20, the paste nozzle 13 is raised as it is rotated so that a cobwebbing part 41 due to the viscosity of the adhesive 40 is surely wrung off to prevent generation of a application failure or a bonding failure caused by falling or scattering of the cobwebbing part 41.
申请公布号 JP2003068774(A) 申请公布日期 2003.03.07
申请号 JP20010253203 申请日期 2001.08.23
申请人 HITACHI LTD;HITACHI TOKYO ELECTRONICS CO LTD 发明人 TAKANO RYUICHI;HOSONO AKISHI
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
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