发明名称 |
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To reduce defective products due to a cobwebbing phenomenon of an adhesive or the like in a pellet bonding process. SOLUTION: In an applying process of a paste such as an adhesive 40 prior to the pellet bonding process, after the adhesive 40 is applied from a paste nozzle 13 onto a tab 21 of a lead frame 20, the paste nozzle 13 is raised as it is rotated so that a cobwebbing part 41 due to the viscosity of the adhesive 40 is surely wrung off to prevent generation of a application failure or a bonding failure caused by falling or scattering of the cobwebbing part 41.
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申请公布号 |
JP2003068774(A) |
申请公布日期 |
2003.03.07 |
申请号 |
JP20010253203 |
申请日期 |
2001.08.23 |
申请人 |
HITACHI LTD;HITACHI TOKYO ELECTRONICS CO LTD |
发明人 |
TAKANO RYUICHI;HOSONO AKISHI |
分类号 |
H01L21/52;(IPC1-7):H01L21/52 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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