| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a carrier for containing stacked wafers in which workability is enhanced at the time of taking in and out the wafers while protecting them against damage. SOLUTION: The carrier 1 for containing wafers comprises a section 3 for containing wafers 2, and a cover part 4 for covering the containing section 3. The containing section 3 is provided with a wall part 6 standing from the bottom face 5 to surround wafers 2 stacked in three directions, wherein the opening of the wall part 6 serves as an inlet/outlet 7. The inlet/outlet 7 has a width matching the diameter of the wafer 2 and opens entirely in the stacking direction of the wafers 2. The cover part 4 is provided with a first wall face 10a covering the inlet/outlet 7 entirely when it covers the containing section 3.</p> |
