METHOD FOR FORMING TEST PATTERN FOR MEASURING P-WELL RESISTANCE

摘要

PURPOSE: A method for forming a test pattern for measuring a P-well resistance is provided to exactly measure the resistance of P-well by forming a depletion region at the interface between a p-type substrate and the P-well. CONSTITUTION: A P-well(2) is formed in a p-type substrate(1). An N-well(3) is formed at both sides of the P-well(2) by implanting n-type impurity ions into the substrate(1). A depletion region(4) is formed at the interface between the P-well(2) and the p-type substrate(1) by applying a desired bias to the N-well(3), thereby isolating electrically the P-well(2) to the p-type substrate(1).