To produce fine to micro structures and/or micro systems, a substrate film is passed between an illuminating roller and a counter roller, with a photo-setting fluid in the gap between them

摘要

To produce fine to micro structures and/or complex micro systems, a layered construction is formed in and of a photo-setting fluid between limit surfaces. The separate layers are formed by illuminating the fluid through a layer topography mask, and the gap between the limit surfaces is progressively increased by each layer thickness. The assembly has an illuminating roller (2), with an inner light source (5) e.g. an ultra violet lamp or laser, and a static illumination slit. A counter roller (3) forms a gap (4) between them for the mask layer material (9). A substrate carrier film (7) passes through the gap, where there is a photo-setting fluid (8) to be polymerized by the light and form the mask layer structure (9).