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经营范围
发明名称
Halbleitervorrichtung und Verfahren zu deren Herstellung
摘要
申请公布号
DE19818518(C2)
申请公布日期
2003.03.06
申请号
DE1998118518
申请日期
1998.04.24
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO
发明人
TADOKORO, CHIHIRO;YAMASHITA, JUNICHI
分类号
H01L21/265;H01L21/336;H01L29/08;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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