发明名称 Semiconductor device and method for manufacturing the same
摘要 A semiconductor device 100 includes wiring layers 12 disposed in a specified pattern on a base 10, and an interlayer dielectric layer 20 that covers the wiring layers 12. The interlayer dielectric layer 20 includes a stress relieving dielectric layer 22 disposed in a specified pattern on the base 10, and a planarization dielectric layer 26 that covers the wiring layers 12 and the stress relieving dielectric layers 22, and is formed from a liquid dielectric member. The interlayer dielectric layer 20 may further include a base dielectric layer 24 and a cap dielectric layer 28.
申请公布号 US2003042611(A1) 申请公布日期 2003.03.06
申请号 US20020227189 申请日期 2002.08.23
申请人 MORI KATSUMI 发明人 MORI KATSUMI
分类号 H01L21/768;H01L23/522;H01L23/528;H01L23/532;(IPC1-7):H01L23/48 主分类号 H01L21/768
代理机构 代理人
主权项
地址