摘要 |
A semiconductor device 100 includes wiring layers 12 disposed in a specified pattern on a base 10, and an interlayer dielectric layer 20 that covers the wiring layers 12. The interlayer dielectric layer 20 includes a stress relieving dielectric layer 22 disposed in a specified pattern on the base 10, and a planarization dielectric layer 26 that covers the wiring layers 12 and the stress relieving dielectric layers 22, and is formed from a liquid dielectric member. The interlayer dielectric layer 20 may further include a base dielectric layer 24 and a cap dielectric layer 28.
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