| 摘要 |
Provision is made of a dicing apparatus, for dicing a plate-like workpiece, comprising a disk-like blade which rotates to form a groove in one surface of the workpiece; a water discharging portion which discharges water toward a bottom of the groove of the one surface of the workpiece to form a stream of water; and a laser light irradiating portion which irradiates a laser light in the stream of water and impinges the laser light onto the bottom of the groove while reflecting the laser light by an inner wall of the stream of water to remove the portion of the workpiece extending from the bottom of the groove to the other surface of the workpiece, so as to dice the workpiece.
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