摘要 |
Point diffraction interferometer has a light source (1) with an input side hole mask (2), a test object region (4) for optics (9) to be tested, means (5, 6) for generation of test and reference beams with an output side hole mask (6) and evaluation means (7, 8) for evaluation of the interference pattern (16) arising from the superimposed reference and test beams. The input and output side hole masks comprise 2-D fields of quasi-point type through holes (12, 15).
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