MIXED SINTERED COMPACT OF SILICON AND SILICON DIOXIDE AND METHOD FOR PREPARATION THEREOF

摘要

A mixed sintered compact of silicon and silicon dioxide, which is prepared from a silicon powder and a silicon dioxide powder and has a bulk density which is 75 % or more relative to that to be obtained when the raw material powders are packed at 0 % porosity and a Vickers hardness of 100 or more; and a method for preparing the mixed sintered compact of silicon and silicon dioxide which comprises mixing a silicon powder and a silicon dioxide powder, and then pressing and sintering the mixed material under vacuum, at a pressure of a press of 15 to 20 MPa, at a temperature of 1350 to 1420˚C, and for a period of one hour or more. The mixed sintered compact has an advantage of the use of a silicon powder and a silicon dioxide powder as raw materials, and also exhibits an enhanced speed in the formation of a silicon monoxide vapor deposition film, is significantly reduced in the occurrence of splashing and is almost free from cracking or chipping even when it is machined into a desired shape.