| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical switch which attains mirror driving with low power consumption, the miniaturization of a device, and simplification the optical axis adjustment of an optical fiber. SOLUTION: A semiconductor substrate with an insulating layer formed by inserting silicon crystal layers is provided with a rotor in which rotor electrodes are formed radially, and a stator in which a plurality of stator electrodes are formed sectorally so as to be paired with the outer peripheral part of the rotor. A reflecting mirror and a flat plate with a hole or a groove for passing light are provided at part of the rotor. The electrostatic driving motor type mirror for varying a flat plate by rotationally driving the rotor by electrostatic force acting between voltage successively applied to the plurality of stator electrodes and voltage applied to the rotor electrodes, is formed so as to cross a first incidence optical path and a first emission optical path, a second incidence optical path and a second emission optical path arranged on a straight line. The optical switch for changing a direction of light is obtained by arranging the flat plate of the electrostatic driving motor type mirror at a prescribed angle at a position where each optical path crosses. |
