| 摘要 |
PROBLEM TO BE SOLVED: To provide members having high purity, excellent thermal shock resistance and high mechanical strength for excellent jigs for thermal treating for producing semiconductors or members of etching apparatuses of producing processes of semiconductors or liquid crystals or others. SOLUTION: The oxide member containing rare earths includes a substrate comprising one or more kinds of metals or an alloy of them selected from a group consisting of C, Si, Al, Ni, Ti, Fe, Mo, Ta, W, and a composite oxide containing rare earth elements including Y and Al, and laminated on the substrate, in which the above composite oxide has a composition shown by 40 to 90 mol% of rare earth oxide and 10 to 60 mol% of Al2 O3 in total quantity of the oxides. And, the jigs for thermal treating using the above oxide member containing rare earths in which the total amount of iron group elements, alkali metal elements and alkaline earth metal elements is 20 ppm or less is provided. |
