PRE-TREATMENT OF ELECTROLESS PLATING

摘要

PROBLEM TO BE SOLVED: To improve the selectivity of electroless plating by removing negative charge on the surface of an insulating film of a substrate. SOLUTION: A pre-treatment of electroless plating for forming a plating film on the substrate 51 by electroless plating is carried out to remove negative charge on the surface of the substrate 51 by applying AC power from an AC power source 18 on the surface of the substrate 51 opposite from the surface on which the plating film of the substrate 51 is formed by dipping the substrate 51 into an electrolyte 41. As the pre-treatment, the negative charge on the surface of the substrate 51 may be removed by applying DC bias power while applying AC power or may be removed while applying pulse power.