| 摘要 |
PROBLEM TO BE SOLVED: To provide an element permitting high speed response without presenting a decreased response speed for strong incident light as a waveguide type semiconductor light receiving element. SOLUTION: Waveguide type semiconductor light receiving element is provided at least a guide layer made of semiconductor having a band gap wavelength shorter than an incident light wavelength. The waveguide type semiconductor light receiving element is structured such that the horizontal width of the guide layer decreases gradually along a travel direction of the light from an incident end in photoelectric transducing areas 14, 15. This structure allows photocurrent to flow equally on the entire photoelectric transducing areas, thereby hardly presenting a decrease of response speed caused by space charge effect, resulting in a high speed response to stronger light. |
