发明名称 |
Method for fabricating improved mirror arrays for physical separation |
摘要 |
A method for fabricating an array of mirrors disposed on a die from a substrate. The method includes placing a substrate comprising a plurality of die thereon on a stage. Each of the die comprises a plurality of movable mirror devices in an array configuration. Each die comprises a peripheral region defining a street that surrounds the array configuration. The method forms a plurality of tabs that join one die to another die in the street of the substrate. Each of the tabs also is separated from each other in a sequential manner by a recessed region between at least two of the tabs. The street defined by the tabs and the recessed region defined therebetween in a sequential manner.
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申请公布号 |
US6527965(B1) |
申请公布日期 |
2003.03.04 |
申请号 |
US20010780845 |
申请日期 |
2001.02.09 |
申请人 |
NAYNA NETWORKS, INC. |
发明人 |
GEE DALE A.;YANG XIAO;SATHE ABHIJEET D. |
分类号 |
B23K26/40;(IPC1-7):B29D11/00;B23K26/00 |
主分类号 |
B23K26/40 |
代理机构 |
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代理人 |
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