METHOD OF MANUFACTURING SHADOW MASK FOR PARTICLE BEAM

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a shadow mask for a particle beam so as to make it executed within a time capable of being approved, even when a mask mold has a complicated anisotropic structure. SOLUTION: The method for manufacturing the shadow mask for the particle beam comprises the steps of calculating following geometrical dimensions: the length and direction of each of all side parts, and the sectional area of each direction by measuring openings of cells of at least one selected part amount of a cell of a model, and analytically calculating the elastic value of the selected cell from a previously selected function, including a statistical parameter derived from the calculated geometrical dimensions as a variable.