STAGE STRUCTURE OF PROBER

摘要

PROBLEM TO BE SOLVED: To provide the stage structure of a prober in which a semiconductor device can be positioned with high accuracy regardless of the temperature at the time of measurement by eliminating the effect of temperature variation at the stage section. SOLUTION: The stage comprises a stage section 1 for holding a wafer W and incorporating a heating/cooling unit 11, a Z stage mechanism section 2 for moving the stage section in Z direction, and a metallic intermediate member 3 interposed between them wherein a hollow section 21a is formed at the Z stage mechanism section and a heat transmitting member 31 extending from the intermediate member with a heat dissipating part 32 being provided at the forward end part penetrates the hollow section. Since heat at the stage section is dissipated through the heat transmitting member, thermal effect onto the Z stage mechanism section can be eliminated.