发明名称 CLEANING BRUSH
摘要 PROBLEM TO BE SOLVED: To enhance cleaning performance of a cleaning brush provided in a machine tool for cleaning a surface on which a processing matter is loaded, prevent deterioration in quality of the processing matter, and enhance the cleaning performance, without making the cleaning brush rock. SOLUTION: There are provided a base 6, which rotates about an axial line 4 substantially perpendicular to a cleaning surface S; and a plurality of brush columns 50b arranged on an opposite surface to the cleaning surface S of this base 6. Each of the brush columns 50b is arranged along an inclined line 12, extending obliquely to a radial straight line 10, with the middle of the radial straight line 10 which extends around the axial line 4 as the starting point.
申请公布号 JP2003059881(A) 申请公布日期 2003.02.28
申请号 JP20010249259 申请日期 2001.08.20
申请人 DISCO ABRASIVE SYST LTD 发明人 MIZOMOTO YASUTAKA
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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