| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma generator which can form a plurality of plasmas efficiently. SOLUTION: The plasma generator 10 for forming a plurality of plasmas is provided with a discharge member 11 connected to a high voltage side electrode and a honeycomb member 20 connected to a low voltage side electrode, the honeycomb member 20 provided with a honeycomb body 21 having a honeycomb structure and a low voltage side member 22 having smaller electrical resistance than the honeycomb member 20 connected to the low voltage side electrode attached so as to surround a side surface of the honeycomb body 21, with a front surface of the honeycomb body 20 placed with an interval to the discharge member 11. A plurality of plasmas can surely be formed even if voltage impressed between electrodes is kept low, so that, each plasma can be formed efficiently. |
