发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device for which mobility of the electrons of an n-channel MOSFET is improved and current driving ability is improved, and to provide a method for manufacturing the device. SOLUTION: The semiconductor device is provided with the n-channel MOSFET and a p-channel MOSFET formed on a silicon substrate 1. The semiconductor device is provided with a nitride film 14 having true stress of tension covering the n-channel MOSFET, and a nitride film 16 having true stress of compression covering the p-channel MOSFET.
申请公布号 JP2003060076(A) 申请公布日期 2003.02.28
申请号 JP20010249799 申请日期 2001.08.21
申请人 NEC CORP 发明人 SAITO TAKEHIRO
分类号 H01L29/78;H01L21/318;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823 主分类号 H01L29/78
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