MICROFABRICATED ACOUSTIC TRANSDUCER WITH SUPPRESSED SUBSTRATE MODES

摘要

The present invention provides a microfabricated acoustic transducer with suppressed substrate modes. The modes are suppressed by either thinning the substrate (10) such that a longitudinal ringing mode occurs outside of the frequency band of interest or by applying a judiciously designed damping material (5) on the backside of the transducer substrate.