发明名称 |
Modular injector and exhaust assembly |
摘要 |
An injector and exhaust assembly for providing delivery of gas to a substrate is provided. The injector and exhaust assembly comprises at least two injectors positioned adjacent each other and spaced apart to form at least one exhaust channel therebetween, and a mounting plate for securing the at least two injectors, wherein each of the at least two injectors being individually mounted to or removed from the mounting plate, and the mounting plate being provided with at least one exhaust slot in fluid communication with the at least one exhaust channel. An exhaust assembly is coupled to the mounting plate to remove exhaust gases from the injectors.
|
申请公布号 |
US2003037729(A1) |
申请公布日期 |
2003.02.27 |
申请号 |
US20020194639 |
申请日期 |
2002.07.12 |
申请人 |
DEDONTNEY JAY BRIAN;MATTHIESEN RICHARD H.;KURITA SAMUEL |
发明人 |
DEDONTNEY JAY BRIAN;MATTHIESEN RICHARD H.;KURITA SAMUEL |
分类号 |
C23C16/44;C23C16/455;H01L21/205;(IPC1-7):C23F1/00;C23C16/00 |
主分类号 |
C23C16/44 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|