APPARATUS AND SYSTEM FOR ARC ION PLATING,申请号EP19940909317-传众专利搜索

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发明名称	APPARATUS AND SYSTEM FOR ARC ION PLATING
摘要
申请公布号	EP0643151(B1)	申请公布日期	2003.02.26
申请号	EP19940909317	申请日期	1994.03.15
申请人	KABUSHIKI KAISHA KOBESEIKOSHO	发明人	HANAGURI, KOJI;TSUJI, KUNIHIKO;NOMURA, HOMARE;TAMAGAKI, HIROSHI;KAWAGUCHI, HIROSHI;SHIMOJIMA, KATSUHIKO;FUJII, HIROFUMI;KIDO, TOSHIYA;SUZUKI, TAKESHI;INOUE, YOICHI
分类号	C23C14/32;H01J37/32;H01L21/00;(IPC1-7):C23C14/32	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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