| 摘要 |
PROBLEM TO BE SOLVED: To obtain the structure of an objective for preventing interfering scattered light, especially, scattered light made incident on an object which should be exposed from occurring. SOLUTION: This catadioptric objective is provided with a beam splitter 4 surrounded at least partially by a mount 12, with a mirror 8, with a plurality of lenses 1, 2 and 3 and with aλ/4 plate 7 arranged between the mirror and the beam splitter. Arranged between the beam splitter and the mount on the side on which false light emerges from the beam splitter is an absorption device 13 that absorbs faulse light traversing the beam splitter.
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