METHOD FOR BONDING QUARTZ GLASS

摘要

PROBLEM TO BE SOLVED: To perform bonding of quartz glass parts at a comparatively low temperature and with high quality. SOLUTION: Joints of the quartz glass parts are closely adhered in a wet state with water and are heated at a temperature being higher than a transition point of the quartz glass and being lower than a softening point thereof in a state where prescribed pressure is applied to the closely adhered part before water at a joint interface dries.