SUBSTRATE HAVING FLUID CHANNEL AND ITS PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a fluid channel penetrating a substrate. SOLUTION: A method for etching a fluid supply slot comprises a step for etching an exposed part on the first surface of a substrate (360), a step for coating the etched part of the substrate (370), and a step for repeating the etching and coating until a fluid channel penetrating a substrate is formed (390).