| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form a through hole in a green sheet for manufacturing a multilayer ceramic base, by inexpensive equipment. SOLUTION: An unburned ceramic sheet 10 supported by a support sheet 12 is covered with a mask 82 having the through hole 84 and sand 72 is made to collide with the sheet by a sand blast device 70. The sand 72 does not collide with a portion covered with the mask 82, but collides with a portion corresponding to the through hole 84, and it removes a part of the green sheet 10 and forms a through hole 83. The through hole 84 is filled later with a conductive paste and made a conducting part piercing the ceramic base in the direction of thickness. A separating groove for separating a separate sheet corresponding to one ceramic base from the web-like green sheet and a cut-off part for cutting off a portion corresponding to one ceramic base therefrom can be formed also likewise. The latter is constituted of a plurality of through holes 90 or the like formed in a state of being arranged along one line, while the former is constituted of these through holes formed in a state of communicating with each other. |
