发明名称 |
DEVICE FOR ASSEMBLING LIQUID CRYSTAL SUBSTRATE |
摘要 |
PROBLEM TO BE SOLVED: To apply almost uniform pressure to the entire surface of substrates subjected to temporary sticking. SOLUTION: A chamber 15 provided with a table 9 holding one substrate 33 being an object to be stuck with liquid crystals dropped thereon and a pressure applying plate 16 holding the other substrate 34 being an object to be stuck opposed to the one substrate 33, is provided with a pipe 21 for introducing gas to return the inside of the decompressed chamber 15 to atmospheric pressure, and an adjusting means 37 for adjusting pressure applied to respective substrate surfaces by the gas introduced from the pipe 21 so as to make the pressure almost uniform is provided in the vicinity of an opening part for gas introduction of the chamber 15 and also within the chamber 15.
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申请公布号 |
JP2003057665(A) |
申请公布日期 |
2003.02.26 |
申请号 |
JP20010250184 |
申请日期 |
2001.08.21 |
申请人 |
HITACHI INDUSTRIES CO LTD |
发明人 |
SAITO MASAYUKI;IMAIZUMI KIYOSHI;HACHIMAN SATOSHI;HIRAI AKIRA |
分类号 |
G02F1/13;G02F1/1339;(IPC1-7):G02F1/133 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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