发明名称 AIR CONDITIONER AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide an air conditioner in which a replacing cycle is shortened by prolonging a lifetime of a various type filter such as a chemical filter or the like and which has an excellent energy conservation effect. SOLUTION: The air conditioner comprises the chemical filter units 5 provided in chambers 2 for passing treated air, and a bypass channel 31 provided between units 21 and 21 in which the filters 5 are mounted. The conditioner further comprises dampers 23, 33 provided at inlets of the units 21, 21 and inlets of the channel 31 for openably and closably setting inlets. If a contaminant in the treated air exceeds an allowable value, the damper 23 of the unit 21 is opened, and the damper 33 of the inlet 32 of the channel 31 is closed. If the contaminant is the allowed value or less, the damper 23 of the unit 21 of the unit 5 is closed, the damper 33 of the inlet 32 of the channel 31 is opened, and hence the treated air flows in the chamber 2 without passing through the chemical filter.</p>
申请公布号 JP2003056898(A) 申请公布日期 2003.02.26
申请号 JP20010246067 申请日期 2001.08.14
申请人 TAKASAGO THERMAL ENG CO LTD;SEIKO EPSON CORP 发明人 OGATA TOMIO;YOSHIDA MINORU;KATO MICHIO
分类号 B01D46/00;F24F13/28;(IPC1-7):F24F13/28 主分类号 B01D46/00
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