| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device and a method for laser beam machining with which the pitch of machined holes is always kept constant. SOLUTION: A numerical controller 6 is set at a simultaneous triaxial control mode and a three dimensional operation including X-axis, Y-axis and an imaginary axis I is synchronously performed. Thus, as to the imaginary axis I, the acceleration and deceleration are performed simultaneously with those for the X-axis and the Y-axis and a starting position and an ending position are moved and attained simultaneously with the X-axis and the Y-axis. In this case, a pulse generator 72 outputs a pulse signal for controlling corresponding to the rotational quantity of an axis driving device 71 of the imaginary axis I to a trigger signal generator 3. The pulse signal for controlling becomes cyclic or a pulse interval inversely proportional to the moving speed of an X-Y stage 4. Thus, machined holes are formed with a constant pitch from the beginning position to the end position on a work W when a laser beam LB emitted from a laser light source 2 is made incident on the work W placed on the X-Y stage 4.</p> |
