Piezoelectric element, process for producing the piezoelectric element, and head for ink-jet printer using the piezoelectric element

摘要

A piezoelectric element capable of improving piezoelectric characteristics of a piezoelectric film is provided, and performance and durability of an ink-jet printer head are improved. A piezoelectric film 7 sandwiched between a lower electrode 6 and an upper electrode 8 is formed of PZT expressed by a chemical formula, Pb(Zr1-xTix)O3 (0.3<=x<=0.9) or formed of a material mainly composed of PZT, and concentration ratio of titanium to zirconium in the piezoelectric film is gradually increased or gradually decreased from upper electrode side to lower electrode side.