Optical beam splitter that can be manufactured by micromechanical means

摘要

A beam splitter has a support frame made of silicon that has a membrane inside made of silicon. The membrane has in particular openings with bridges formed between them. On the side of membrane facing the incident beam is an aluminum coating to increase the reflectability or degree of reflection of the membrane. An incident beam bundle contacts the beam splitter at angle of incidence phi. A portion of the incident beam is reflected off the bridges, and the remaining portion of the beam freely passes through the openings. The beam is correspondingly divided into a reflective portion and transmitted portion.