发明名称 |
METHOD AND APPARATUS FOR CLEANING DRUM SUBSTRATE FOR PHOTOSENSOR |
摘要 |
PROBLEM TO BE SOLVED: To enable scrub cleaning to be simply and efficiently carried out with a cleaning brush in a cleaning liquid flowing through a drum substrate. SOLUTION: A drum substrate 4 is placed horizontally on and in parallel with a support roller 20 and a cleaning brush 21 horizontally arranged in parallel with each other in a cleaning vessel 3. While a cleaning liquid 2 is caused to horizontally flow into the cleaning vessel 3, the support roller 20 and the cleaning brush 21 are rotated in the same direction to rotate the drum substrate 4 at a speed different from that of the cleaning brush. Thus, the drum substrate 4 in the state of being immersed in the flowing cleaning liquid 2 is subjected to scrub cleaning with the cleaning brush 21.
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申请公布号 |
JP2003053285(A) |
申请公布日期 |
2003.02.25 |
申请号 |
JP20010249257 |
申请日期 |
2001.08.20 |
申请人 |
SPEEDFAM CLEAN SYSTEM CO LTD |
发明人 |
FUKUMURA MASATO;SUGAI JUNICHI |
分类号 |
G03G5/00;B08B1/04;B08B3/02;B08B3/10;B08B3/12;B08B7/04;(IPC1-7):B08B7/04 |
主分类号 |
G03G5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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