| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength control apparatus and a wavelength control method that can quickly and accurately control the center wavelength of a pulse laser beam to a target one, immediately after the stop of a burst mode. SOLUTION: The wavelength control apparatus for a laser apparatus has an optical component rotation means for changing an incident angle (ϕ), where a pulse laser beam (21) enters a narrow-band optic element (33) by rotating the optical component by drive mechanisms. In this case, the wavelength control apparatus is equipped with a first drive mechanism (41) for rotating the optical component during stop, so that a center wavelength (λc) immediately after re-oscillation approaches a target wavelength (λ0), based on the chirping of the center wavelength (λc) that is generated during the stop of laser oscillation, and a second driving mechanism (40) for rotating the optical component during the stop, so that the center wavelength (λc) approaches a new target wavelength (λn), based on a wavelength change command (D) for instructing a change in the target wavelength (λ0). |
