发明名称 METHOD AND DEVICE FOR INSPECTING DIRECT RADIATION IMAGE PICKUP DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of inspecting a direct radiation image pickup device in which inspections performed by using X-rays are replaced with a simple method while the qualities of the inspections are maintained, and to provide an inspection device used for the method. SOLUTION: This method is used for inspecting a direct radiation image pickup device having a photoelectric conversion element 300 in which an electrode layer 302 for impressing a voltage for reading out converted electric signals on a converting layer 301 which converts radiation into the electric signals. The electrode layer 302 has openings and the photoelectric conversion element 300 is inspected by projecting a near infrared ray upon the electrode layer 302 while a voltage is impressed on the layer 302.
申请公布号 JP2003051587(A) 申请公布日期 2003.02.21
申请号 JP20010237991 申请日期 2001.08.06
申请人 CANON INC 发明人 YAGI TOMOYUKI
分类号 G01T1/24;G01T7/00;H01L27/14;H01L27/146;H01L31/00;H01L31/0264;H04N5/32;(IPC1-7):H01L27/14;H01L31/026 主分类号 G01T1/24
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