发明名称 |
METHOD AND SYSTEM FOR DYNAMIC LEARNING THROUGH A REGRESSION-BASED LIBRARY GENERATION PROCESS |
摘要 |
The present invention relates to a method and system for efficiently determining grating profiles using dynamic learning in a library generation process. The present invention also relates to a method and system for searching and matching trial grating profiles to determine shape, profile, and spectrum data information associated with an actual grating profile. |
申请公布号 |
WO03014866(A2) |
申请公布日期 |
2003.02.20 |
申请号 |
WO2002US23736 |
申请日期 |
2002.07.25 |
申请人 |
TIMBRE TECHNOLOGIES, INC. |
发明人 |
NIU, XINHUI;JAKATDAR, NICKHIL |
分类号 |
G01B11/06;G01B11/24;G01J4/00;G01N21/21;G06F;G06F7/60;G06F17/10;G06F19/00;H03F1/26 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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