发明名称 |
Verfahren zur Herstellung integrierter Schaltungen und erzeugte Halbleiterscheibe |
摘要 |
<p>Manufacturing method for electronic circuits (2) integrated monolithically on a semiconductor support (1) on which said electronic circuits (2) are regularly spaced apart by dividing scribing lines (11) and a network of electrical connection lines (12) used for diagnostic purposes in the wafer of semiconductor material on which are provided the integrated electronic circuits (2). In this manner it is possible to simultaneously perform electrical testing of all the circuits present on the same wafer. <IMAGE></p> |
申请公布号 |
DE69432016(D1) |
申请公布日期 |
2003.02.20 |
申请号 |
DE1994632016 |
申请日期 |
1994.09.13 |
申请人 |
STMICROELECTRONICS S.R.L., AGRATE BRIANZA |
发明人 |
MURARI, BRUNO;TOSCANI, ROBERTO;MARCHIO', FABIO;STORTI, SANDRO |
分类号 |
H01L21/66;G01R31/28;H01L21/822;H01L23/58;H01L27/02;H01L27/04;H05K1/02;H05K1/03;H05K3/00;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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