发明名称 Optical switch with multiplexed data and control signals separated by group velocity dispersion
摘要 High quality epitaxial layers of monocrystalline materials can be grown overlying a monocrystalline substrate of a semiconductor structure by forming a compliant substrate for growing the monocrystalline layers. An accommodating buffer layer comprises a layer of monocrystalline oxide spaced apart from a silicon wafer by an amorphous interface layer of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. An optical waveguide is formed in a monocrystalline layer grown on the semiconductor structure for distributing an optical signal to a selected portion of circuitry formed in the semiconductor structure. An optical source is formed in the semiconductor structure and coupled to the optical waveguide for generating a control signal and a data signal concurrently. The control signal propagates through the optical waveguide faster than the data signal to create a delay between the control signal and the data signal. An optical switch receives the control signal and switches the delayed data signal to a selected portion of circuitry formed in the semiconductor structure in response to the control signal.
申请公布号 US2003036213(A1) 申请公布日期 2003.02.20
申请号 US20010930308 申请日期 2001.08.16
申请人 MOTOROLA, INC. 发明人 BROPHY TIMOTHY J.
分类号 G02B6/42;G02B6/43;H01L21/20;H01L21/8258;H01L27/06;(IPC1-7):H01L21/00 主分类号 G02B6/42
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