发明名称 |
METHOD AND APPARATUS FOR DOPING SEMICONDUCTORS |
摘要 |
Semiconductor materials such as silicon particles are doped by mixing the semiconductor material with a solution having a dopant and a solvent. The solvent is removed from the wetted surface of the particles of the semiconductor material, thereby yielding particles that are substantially free from the solvent and are uniformly coated with the dopant. |
申请公布号 |
WO03015144(A1) |
申请公布日期 |
2003.02.20 |
申请号 |
WO2002US25259 |
申请日期 |
2002.08.08 |
申请人 |
EVERGREEN SOLAR, INC. |
发明人 |
CRETELLA, MARY, C.;WALLACE, RICHARD, L. |
分类号 |
C01B33/02;C30B29/06;H01L21/22;H01L21/228;H01L31/0288;H01L31/04;H01L31/18 |
主分类号 |
C01B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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