METHOD AND EQUIPMENT FOR CLEANING SUBSTRATE,申请号KR20027011888-传众专利搜索

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发明名称	METHOD AND EQUIPMENT FOR CLEANING SUBSTRATE
摘要
申请公布号	KR20030015208(A)	申请公布日期	2003.02.20
申请号	KR20027011888	申请日期	2002.09.10
申请人		发明人
分类号	B08B3/12;G02F1/13;B08B3/02;G02F1/1333;H01L21/304	主分类号	B08B3/12
代理机构		代理人
主权项
地址

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