MICRO HYDROGEN ION CONCENTRATION SENSOR INCLUDING HYDROGEN ION SENSING FILM HAVING ACCUMULATED STRUCTURE OF SILICON NITRIDE AND GLASS

摘要

PURPOSE: A micro hydrogen ion concentration sensor including a hydrogen ion sensing film having an accumulated structure of silicon nitride and glass is provided to minimize hydration and reduction of Na+ ion, thereby realizing the stability of the micro hydrogen ion concentration sensor and extending the life span. CONSTITUTION: In a micro hydrogen ion concentration sensor including a silicon substrate(11), a reference electrode(13) formed on the silicon substrate, a buffer solution(16) filled in an etching part(12) of the silicon substrate, and a glass electrode(14) attached to a rear part of the silicon substrate to close the etching part, the micro hydrogen ion concentration sensor includes a silicon nitride thin film layer(18) in fine thickness to cover the surface of the glass electrode.