| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding pad conditioning device capable of reliably detecting abnormality in a conditioning work of a grinding pad for grinding a work, and a grinding device using the grinding pad conditioning device. SOLUTION: The grinding pad conditioning device comprises a rotatable conditioning means for conditioning a surface of the grinding pad, a drive source for rotating the conditioning means, and a rotation detecting means for detecting the detection of the conditioning means. |
