| 摘要 |
A cleanbox that can prevent contamination from not only external sources but also from within the cleanbox from such sources as substrates and internal components of the cleanbox, includes a casing container (18) formed by a container main body (12) and a lid member (14) for hermetically sealing a top opening section of the container main body; a dividing wall (20) for forming circulation paths having an upstreaming path and a downstreaming paths within the casing container; a substrate holding section (24) disposed in the upstreaming path for holding broad surfaces of substrates (W) approximately parallel to the upstreaming path; an air filter (26) and a gas removal filter (28) disposed upstream in relation to the substrate holding section in the upstreaming path; and a motor-driven fan (30) housed in the casing container for producing air streams circulating in the circulating paths.
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